![](https://altayinc.com/home/wp-content/uploads/2022/06/Megasonic_vibration_plate-1.png)
Challenges solved include:
- Uniform particle removal
- Front end of line (FEOL) and back end of line (BEOL) cleans
- Easy to retrofit to existing wet stations
- Post-CMP/polish cleaning
- Residual glue removal
- Acid-, solvent- and stripper-compatible materials
- MEMS process enhancements
- High Megasonic cleans and removes particles without any damages to the structures
- Solve your critical cleaning issues with our hyper Megasonic
- Custom Process Quartz Tanks, Baths, Megasonic, Utrasonic
- High frequency setup:750kHz or 950kHz
- Replacement services for your existing Megasonic systems
![](https://altayinc.com/home/wp-content/uploads/2022/06/HF.jpg)
970 kHz Digital Hyper Megasonic
![digital mega hypersonic](https://altayinc.com/home/wp-content/uploads/2022/06/digital-mega-hypersonic-300x288.jpg)
Control Panel
![](https://altayinc.com/home/wp-content/uploads/2022/06/operation-panel-300x221.jpg)
Semiconductor Wafer / LCD
Sub-micron Particle Cleaning
- Digital Display
- CPU Power Control
- High / Low Alarm Control
- Feedback Control System
- Remote & Power on/off
- RS-485 Communication
Specification | |
---|---|
Model | MW-0609AP |
Output Efficiency | 600Wmax |
Output Control | 0∿600W |
Output Circuit | D-Push Pull |
Electric Power | AC 220V, 1ϕ, 50/60Hz |
Consumming Current | 6.5 Amax |
Output Display | 7-Segment / RS-485 Comm. |
Dimensions | 320mm(W)x460mm(L)x165mm(H) |
Weight | About 15kg |
![](https://altayinc.com/home/wp-content/uploads/2022/06/digital-mega-hypersonic-histogram.jpg)
![](https://altayinc.com/home/wp-content/uploads/2022/06/digital-mega-hypersonic-detail.jpg)
Megasonic Transducer
![](https://altayinc.com/home/wp-content/uploads/2022/06/megasonic-transducer-300x192.jpg)
![](https://altayinc.com/home/wp-content/uploads/2022/06/megasonic-transducer-2-300x224.jpg)
Plate Type
MODEL | MW-1600TD | MW-1800TD | MW-300TD |
---|---|---|---|
Allowance input power | 1200Wmax | 1800Wmax | 2400Wmax |
Frequency | 970 kHz+25kHz | 970 kHz+25kHz | 970 kHz+25kHz |
Plate material | SUS316L(or Quartz) | SUS316L(or Quartz) | SUS316L(or Quartz) |
Using water temp | 70°C Max | 70°C Max | 70°C Max |
Effective size | 136L X 163W | 165L X 215W | 136L X 163W |
Wafer | 6″X25 PCS | 8″ X25 PCS | 6″ X25 PCS |
Generator Moder | MW-0609AP x 2 | MW-0609AP x 3 | MW-0609APX2 |
![](https://altayinc.com/home/wp-content/uploads/2022/06/wafer-cleaning-transducer-table.jpg)
![](https://altayinc.com/home/wp-content/uploads/2022/06/wafer-cleaning-transducer-table2.jpg)
Immersible Type
Kyungil Model | Specification |
---|---|
UltrasonickNXG-S model |
-28kHz/40kHz/68kHz/132kHz/180kHz -LED type level indicator (Analog display) -300W/600W/120W -Alarm out : relay out -300 X 420 X 140(mm) |
UltrasonickNXG-D model |
– 28kHz/40kHz/68kHz/132kHz/180kHz -LCD type output display -300W/600W/1200W -PLL auto tunning -Auto power control -Alarm out : relay out -RS-485 communication -310 X 440 x 130(mm) |
Megasonic MW-0609 model |
-750kHz / 970 kHz -7 Segment Display -CPU Power Auto Control -Remote & 8 power control -High/low Alarm control -RS-485 communication -Feedback control System -320 x 460 X 165(mm) |
970kHz Megasonic
![](https://altayinc.com/home/wp-content/uploads/2022/06/970a1.jpg)
![](https://altayinc.com/home/wp-content/uploads/2022/06/970a2.jpg)
50W
![](https://altayinc.com/home/wp-content/uploads/2022/06/970a3.jpg)
100W
![](https://altayinc.com/home/wp-content/uploads/2022/06/970b1.jpg)
![](https://altayinc.com/home/wp-content/uploads/2022/06/970b2.jpg)
![](https://altayinc.com/home/wp-content/uploads/2022/06/970b3.jpg)
1.95MHz Megasonic
![](https://altayinc.com/home/wp-content/uploads/2022/06/1_95a1.jpg)
![](https://altayinc.com/home/wp-content/uploads/2022/06/1_95a2.jpg)
![](https://altayinc.com/home/wp-content/uploads/2022/06/1_95a3.jpg)
![](https://altayinc.com/home/wp-content/uploads/2022/06/1_95b1.jpg)
![](https://altayinc.com/home/wp-content/uploads/2022/06/1_95b2.jpg)
50W
![](https://altayinc.com/home/wp-content/uploads/2022/06/1_95b3.jpg)
100W
![](https://altayinc.com/home/wp-content/uploads/2022/06/hist1.jpg)
![](https://altayinc.com/home/wp-content/uploads/2022/06/hist2.jpg)